Plasma diagnostics in pulsed laser TiN layer deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358708
Reference12 articles.
1. Deposition of high quality TiN films by excimer laser ablation in reactive gas
2. Growth of thin films by laser-induced evaporation
3. High‐quality optical and epitaxial Ge films formed by laser evaporation
4. Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical model
5. Cu0, Cu+, and Cu2from excimer‐ablated copper
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