Modification of hydrogen-free amorphous carbon films by focused-ion-beam milling
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371792
Reference33 articles.
1. Application of the Focused-Ion-Beam Technique for Preparing the Cross-Sectional Sample of Chemical Vapor Deposition Diamond Thin Film for High-Resolution Transmission Electron Microscope Observation
2. Focused-ion-beam-assisted etching of diamond in XeF[sub 2]
3. Chemically and geometrically enhanced focused ion beam micromachining
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