Effect of RF power and annealing on chemical bonding and morphology of a-CNx thin films as humidity sensor-Reference-Cited by-同舟云学术

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Effect of RF power and annealing on chemical bonding and morphology of a-CNx thin films as humidity sensor

Published:2013 Issue: Volume: Page:
ISSN:0094-243X
Container-title:AIP Conference Proceedings
language:
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Author:

Aziz N. F. H,Ritikos R.,Kamal S. A. A.,Hussain N. S. Mohamed,Awang R.

Publisher

AIP Publishing LLC

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Amorphous Carbon Films for Electronic Applications;Advanced Materials;2022-11-21

2. Komposisi Ikatan Kimia dan Mekanisme Pertumbuhan Filem Nipis a-CNx oleh Teknik rf-PECVD Suhu Rendah;Sains Malaysiana;2020-06-30

3. Highly selective and sensitive O2 plasma treated sputtered thin film sensor for sub-ppm level NH3 detection at room temperature;Journal of Materials Science: Materials in Electronics;2019-01-02

4. Structural changes of a-CNx thin films induced by thermal annealing;AIP Conference Proceedings;2018

5. Characterization of a-CNx Thin Films Prepared by RF-PECVD Technique for Humidity Sensor;Sains Malaysiana;2017-03-31

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