Formation of low defect density SiOxfilms for Josephson integrated circuits
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96134
Reference5 articles.
1. Fabrication Process for Josephson Integrated Circuits
2. Silicon valence in SiO films studied by X-ray emission
3. Properties of Evaporated Thin Films of SiO
4. Stress Anisotropy in Silicon Oxide Films
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