MEMS post-processed self-assembled electret for vibratory energy harvesters

Author:

Yamane Daisuke12ORCID,Kayaguchi Hideyuki3,Kawashima Kosuke1,Ishii Hisao34ORCID,Tanaka Yuya234ORCID

Affiliation:

1. Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University, Kusatsu 525-8577, Japan

2. Japan Science and Technology Agency, PRESTO, Kawaguchi 332-0012, Japan

3. Graduate School of Science and Engineering, Chiba University, Chiba 263-8522, Japan

4. Center for Frontier Science, Chiba University, Chiba 263-8522, Japan

Funder

Japan Science and Technology Agency

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Electret-based energy harvesters: A review;Nano Energy;2024-08

2. Circuit Simulator Implementation of an Equivalent Circuit Model of Self‐Assembled Electret Vibrational Energy Harvesters Based on An Energy Diagram;IEEJ Transactions on Electrical and Electronic Engineering;2023-12-26

3. Investigation of the Relationship Between Surface Potential and Film Thickness of Micro-Patterned Self-Assembled Electrets;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11

4. Modeling the Effects of a Protective Film for Spontaneously-Polarized Electrets on the Power Harvesting Performance of a Wind Energy Harvester;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11

5. An Equivalent Circuit Model of Self-Assembled Electret Mems Vibration Energy Harvesters Based on an Energy Diagram in Hardware Description Language;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11

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