Circuit Simulator Implementation of an Equivalent Circuit Model of Self‐Assembled Electret Vibrational Energy Harvesters Based on An Energy Diagram

Author:

Tokuno Kyosuke1,Kinoshita Shohei1,Kayaguchi Hideyuki2,Kurihara Keisuke2,Ishii Hisao23,Tanaka Yuya4,Yamane Daisuke1

Affiliation:

1. Graduate School of Science and Engineering Ritsumeikan University 1‐1‐1 Noji‐Higashi Kusatsu Shiga 525‐8577 Japan

2. Graduate School of Science and Engineering Chiba University 1‐33 Yayoi‐cho, Inage‐ku Chiba Chiba 263‐8522 Japan

3. Center for Frontier Science Chiba University 1‐33 Yayoi‐cho, Inage‐ku Chiba Chiba 263‐8522 Japan

4. Graduate School of Science and Technology Gunma University 1‐5‐1 Tenjin‐cho Kiryu Gunma 376‐8515 Japan

Abstract

This paper reports an equivalent circuit model of self‐assembled electret (SAE) micro‐electro‐mechanical systems (MEMS) vibrational energy harvesters (VEHs). For the first time, a detailed equivalent circuit model of the SAE‐MEMS VEH has been implemented on a circuit simulator, considering the device energy diagram. The implemented equivalent circuit model allows analysis of the relationship between output current and SAE properties, device structures, and electrode materials. The validity of the model is confirmed by comparing the measurement and simulation results. Thus, the proposed model would be useful for the design of SAE‐MEMS VEHs. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

Funder

Samco Foundation

Publisher

Wiley

Subject

Electrical and Electronic Engineering

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