Boron oxide interaction with silicon in silicon molecular beam epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97513
Reference3 articles.
1. Boron doping in Si molecular beam epitaxy by co‐evaporation of B2O3or doped silicon
2. Chemical bonding and electronic structure of B2O3, H3BO3, and BN: An ESCA, Auger, SIMS, and SXS study
3. Etching of SiO2Films by Si in Ultra-High Vacuum
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