Electron cross section set for CHF3
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1382833
Reference37 articles.
1. Electron Collision Data for Plasma Chemistry Modeling
2. Electron drift and attachment in CHF3 and its mixtures with argon
3. Ionization, electron attachment, and drift inCHF3
4. Electron Interactions with CHF3
5. Electron Interactions With Plasma Processing Gases: An Update for CF4, CHF3, C2F6, and C3F8
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