Low-pressure hydrogen discharge maintenance in a large-size plasma source with localized high radio-frequency power deposition
Author:
Affiliation:
1. Faculty of Physics, Sofia University, BG-1164 Sofia, Bulgaria
2. Department of Applied Physics, Technical University-Sofia, BG-1000 Sofia, Bulgaria
Funder
EURATOM
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4913810
Reference37 articles.
1. Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell
2. Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
3. Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor
4. Spatial distributions of power and ion densities in RF excited remote plasma reactors
5. Ion drag effects in inductively coupled plasmas for etching
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