Kinetics of Si growth from hydride precursors on As-passivated Si(001) surface
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1347396
Reference14 articles.
1. The n-channel SiGe/Si modulation-doped field-effect transistor
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5. Arsenic-doped Si(001) gas-source molecular-beam epitaxy: Growth kinetics and transport properties
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