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High temperature thermal properties of thin tantalum nitride films

  • Published:2011-12-26 Issue:26 Volume:99 Page:261906
  • ISSN:0003-6951
  • Container-title:Applied Physics Letters
  • language:en
  • Short-container-title:Appl. Phys. Lett.

Author:

Bozorg-Grayeli Elah,Li Zijian,Asheghi Mehdi,Delgado Gil,Pokrovsky Alexander,Panzer Matthew,Wack Daniel,Goodson Kenneth E.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 33 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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