Electrical properties of rapid thermal oxides on Si1−x−yGexCy films

Author:

Bera L. K.,Choi W. K.,Feng W.,Yang C. Y.,Mi J.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Effects of CF4 Surface Etching on 4H-SiC MOS Capacitors;Materials Science Forum;2018-06

2. High-k gate oxide for silicon heterostructure MOSFET devices;Journal of Materials Science: Materials in Electronics;2006-09

3. Investigation of thermal effect on electrical properties of Si0.887Ge0.113 and Si0.887−yGe0.113Cy films;Journal of Applied Physics;2004-04-15

4. Bibliography;Silicon-Germanium Strained Layers and Heterostructures;2003

5. C-V AND DLTS CHARACTERIZATION OF RAPID THERMAL OXIDES ON Si0.887Ge0.113 AND Si0.8811Ge0.113C0.0059 ALLOYS;International Journal of Modern Physics B;2002-11-20

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