A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3492442
Reference17 articles.
1. Nonclassical Smoothening of Nanoscale Surface Corrugations
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5. Silicon nanostructuring for 3D bulk silicon versatile devices
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1. Morphological Evolution of Pit-Patterned Si(001) Substrates Driven by Surface-Energy Reduction;Nanoscale Research Letters;2017-09-29
2. Effects of surface diffusion on high temperature selective emitters;Optics Express;2015-04-10
3. Shape evolution of high aspect ratio holes on Si(001) during hydrogen annealing;Journal of Applied Physics;2013-11-14
4. Surface-diffusion-driven decay of high-aspect-ratio gratings: Existence of morphologically related classes;Physical Review E;2013-06-26
5. One-dimensional gratings evolving through high-temperature annealing: sine-generated solutions;Journal of Physics: Condensed Matter;2011-11-17
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