Quantitative electrostatic force measurement and characterization based on oscillation amplitude using atomic force microscopy-Reference-Cited by-同舟云学术

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Quantitative electrostatic force measurement and characterization based on oscillation amplitude using atomic force microscopy

Published:2020-01-01 Issue:1 Volume:10 Page:015143
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Wang Kesheng¹²,Lu Yijia¹,Cheng Jia¹^ORCID,Zhu Xiaoying³,Ji Linhong¹^ORCID

Affiliation:

1. State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, 100084 Beijing, China

2. Ambow Research Institute, Ambow Education Group, 100043 Beijing, China

3. National Key Laboratory for Remanufacturing, Army Academy of Armored Forces, 100072 Beijing, China

Funder

National Science and Technology Major Project of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5136332

Reference33 articles.

1. Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements

2. Electrostatic force microscopy studies of boron-doped diamond films

3. Electric Control of Friction on Silicon Studied by Atomic Force Microscope

4. POTENTIAL PROFILE MEASUREMENT OF CARBON NANOTUBE FETs BASED ON THE ELECTROSTATIC FORCE DETECTION

5. Accurate Extraction of Electrostatic Force by a Voltage-Pulse Force Spectroscopy

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