Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements

Author:

Zaghloul U.,Bhushan B.,Pons P.,Papaioannou G.J.,Coccetti F.,Plana R.

Publisher

Elsevier BV

Subject

Colloid and Surface Chemistry,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials

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5. Nanotribology and Nanomechanics I – Measurement Techniques and Nanomechanics, II – Nanotribology, Biomimetics, and Industrial Applications;Bhushan,2011

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