Experimental and numerical studies of microwave-plasma interaction in a MWPECVD reactor
Author:
Affiliation:
1. CNR-Istituto di Nanotecnologia (NANOTEC) – PLASMI Lab, Via Amendola 122/D, Bari, Italy
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference21 articles.
1. V. L. Ginzburg, Propagation of Electromagnetic Waves in Plasma (Amsterdam North Holland Publishing Company, 1961).
2. Numerical calculation of the reflection, absorption, and transmission of microwaves by a nonuniform plasma slab
3. B. Guo and X. Wang, “Power absorption of high frequency electromagnetic waves in a partially ionized plasma layer in atmosphere conditions,” Plasma Sci. Technol. 7, 2645–2648 (2005).
4. INTERACTION OF ELECTROMAGNETIC WAVE AND PLASMA SLAB WITH PARTIALLY LINEAR AND SINUSOIDAL ELECTRON DENSITY PROFILE
5. ANALYTICAL MODEL OF ELECTROMAGNETIC WAVES PROPAGATION AND LOCATION OF INCLINED PLASMA LAYERS USING OCCULTATION DATA
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