1. S. K. Saha, “Technology CAD for integrated circuit fabrication technology development and technology transfer,” in Design and Process Integration for Microelectronic Manufacturing, SPIE Conference Proceedings 5042, edited by Alexander Starikov (Santa Clara, CA, 2003) pp. 63–74.
2. Modelling the effectiveness of computer-aided development projects in the semiconductor industry
3. The International Technology Roadmap for Semiconductors (ITRS) Official Website, see http://www.itrs2.net.
4. M. Korolev, T. Krupkina, M. Reveleva, Technology, design and modeling techniques of Si IC (in Russian - Tehnologiya, konstrukciya I metody modelirovaniya kremnievyh integralnyh mikroshem), (Binom, Moscow, 2012), pp. 199–397.
5. Process Simulation Calibration, presentation material, see http://www.silvaco.com/content/kbase/process_sim_calibration.pdf.