Halogen impurities in silicon: Shallow single donors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119652
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2. Effective Modulation of Ni Silicide Schottky Barrier Height Using Chlorine Ion Implantation and Segregation;IEEE Electron Device Letters;2009-11
3. Microstructural evolution in silicon implanted with chlorine ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-03
4. Origin of the hole gas at the Si(111):Cl surface: Role of surface electronic structure, impurities, and defects;Physical Review B;2006-05-02
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