Metal drift induced electrical instability of porous low dielectric constant film
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1563292
Reference11 articles.
1. Advanced silicon IC interconnect technology and design: present trends and RF wireless implications
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3. Novel Porous Films Having Low Dielectric Constants Synthesized by Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics
4. Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
5. SiO2 aerogel film as a novel intermetal dielectric
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