Gas-phase nanoparticle formation during AlGaN metalorganic vapor phase epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1510580
Reference8 articles.
1. OMVPE growth and gas-phase reactions of AlGaN for UV emitters
2. The influence of TMA and SiH4 on the incorporation rate of Ga in AlxGa1−xN crystals grown from TMG and NH3
3. A study of parasitic reactions between NH3 and TMGa or TMAI
4. AlN and AlGaN growth using low-pressure metalorganic chemical vapor deposition
5. GaN Growth by Metallorganic Vapor Phase Epitaxy: A Comparison of Modeling and Experimental Measurements
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5. Crystal structures and stabilities of AlxGa1-xN and P-Type AlxGa1-xN with different Al compositions: A density functional study;Vacuum;2020-03
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