Interstitial oxygen molecules in amorphous SiO2. III. Measurements of dissolution kinetics, diffusion coefficient, and solubility by infrared photoluminescence
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1943506
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1. General Relationship for the Thermal Oxidation of Silicon
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