Structural characterization of nanometer SiC films grown on Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109106
Reference7 articles.
1. Growth and Characterization of Cubic SiC Single‐Crystal Films on Si
2. Epitaxial Growth and Characterization of β ‐ SiC Thin Films
3. Epitaxial growth of beta -SiC on Si by RTCVD with C/sub 3/H/sub 8/ and SiH/sub 4/
4. Rapid thermal chemical vapor deposition growth of nanometer-thin SiC on silicon
5. Epitaxial growth and electric characteristics of cubic SiC on silicon
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