Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2784294
Reference20 articles.
1. Formation and behaviour of nano/micro-particles in low pressure plasmas
2. Dusty plasma formation: Physics and critical phenomena. Theoretical approach
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4. Colloquium:Reactive plasmas as a versatile nanofabrication tool
5. Contribution of plasma generated nanocrystals to the growth of microcrystalline silicon thin films
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3. Microscopic studies of polycrystalline nanoparticle growth in free space;Journal of Crystal Growth;2017-06
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