Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2181651
Reference12 articles.
1. Chemical Fluid Deposition: Reactive Deposition of Platinum Metal from Carbon Dioxide Solution
2. Deposition of Conformal Copper and Nickel Films from Supercritical Carbon Dioxide
3. Low-Temperature Deposition of Conformal Copper Films in Supercritical CO2 by Catalytic Hydrogen Reduction of Copper Hexafluoroacetylacetonate
4. Metal Oxide Thin Films Deposited from Metal Organic Precursors in Supercritical CO2 Solutions
5. Atomic layer epitaxy - a valuable tool for nanotechnology?
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Cu Wiring Fabrication by Supercritical Fluid Deposition for MEMS Devices;Novel Metal Electrodeposition and the Recent Application;2019-03-06
2. Determination and correlation of infinite dilution binary diffusion coefficients for aluminum acetylacetonate in supercritical and liquid fluids;Fluid Phase Equilibria;2016-07
3. Chemical deposition of silica-based thin films under supercritical carbon dioxide atmosphere using tetraethylorthosilicate precursor with oxidizing agents;Journal of the Ceramic Society of Japan;2016
4. Solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) in mixed supercritical CO2 and H2 systems for application in supercritical fluid deposition of Cu;The Journal of Supercritical Fluids;2015-10
5. Selective Cu filling of nanopores using supercritical carbon dioxide;Japanese Journal of Applied Physics;2015-04-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3