Improved performance in Ru∕Ta2O5∕Ru capacitors using forming gas annealing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2172736
Reference28 articles.
1. Structural and electrical properties of Ba0.5Sr0.5TiO3 thin films with conductive SrRuO3 bottom electrodes
2. Structure and properties of epitaxial Ba0.5Sr0.5TiO3/SrRuO3/ZrO2 heterostructure on Si grown by off‐axis sputtering
3. Temperature-Dependent Current-Voltage Characteristics of Fully ProcessedBa0.7Sr0.3TiO3Capacitors Integrated in a Silicon Device
4. Erratum: “Exciton spectra of ZnO epitaxial layers on lattice-matched substrates grown with laser-molecular-beam epitaxy” [Appl. Phys. Lett. 76, 3549 (2000)]
5. Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memories
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