Excimer laser ablation of thick SiOx-films: Etch rate measurements and simulation of the ablation threshold
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4748127
Reference23 articles.
1. Optical Interference Coatings
2. Silicon Nanocrystals
3. Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
4. High resolution ultraviolet photoablation of SiOxfilms
5. Ablation of silicon suboxide thin layers
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