Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2128055
Reference24 articles.
1. Extreme Ultraviolet Light Sources for Semiconductor Manufacturing
2. 4d–4f emission resonances in laser-produced plasmas
3. Ground-state configurations of ionic species I through XVI forZ=57−74and the interpretation of4d−4femission resonances in laser-produced plasmas
4. Statistics and characteristics of xuv transition arrays from laser-produced plasmas of the elements tin through iodine
5. Large room-temperature magnetoresistance in Ag–Ti-added La0.67Ba0.33MnO3
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