Rapid observation of dispersion curves in system-on-chip devices

Author:

Wei Zimiao1ORCID,Chen Yikai1ORCID,Li Junfeng1ORCID,Wang Zekai1ORCID,Wu Xueqin1ORCID,Zheng Jiale1,Liu Xilong1ORCID,Lan Wenke1ORCID,Song Yang1,Shen Zhonghua1ORCID,Fu Qiang2

Affiliation:

1. School of Sciences, Nanjing University of Science and Technology 1 , Nanjing 210094, China

2. Department of Optoelectronic Information Science and Engineering, School of Physics and Materials Engineering, Hefei Normal University 2 , Hefei 230601, China

Abstract

We have developed a rapid detection instrument to characterize the behavior of light on the surface of devices during light–matter interactions. The equipment enables the non-destructive and real-time observations of the dispersion curves for microstructures, providing the basis for a large number of new planar photonic chip applications. The method is based on the traditional prismatic reflection and makes full use of the grating dispersion capabilities, enabling simultaneous multi-wavelength and multi-angle reflectance measurements over a wide range. This method is beneficial for designing new microstructure devices and brings convenience to delicate microstructure processing. The instruments do not require any mechanical scanning, allowing for rapid acquisition, and the integrated and reusable optics make them easily miniaturized. Additionally, the functionalized design allows for spectral analysis applications, such as far-field spectral measurements. The instrument can also be easily integrated into established microscopic imaging systems, extending their observational characterization capabilities as well as accomplishing dynamic monitoring in proven system-on-a-chip devices.

Funder

National Natural Science Foundation of China

Natural Science Foundation of Jiangsu Province

Anhui Provincial Department of Education

Publisher

AIP Publishing

Subject

Instrumentation

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