Doping gas effects on plasma enhanced chemical vapor deposition on heavily phosphorus-doped n+silicon film
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120146
Reference12 articles.
1. Spectral Response of a-Si:H p-i-n Solar Cells Degraded by Blue and Red Light
2. Low temperature plasma enhanced CVD of highly conductive single crystalline and polycrystalline silicon materials
3. The Characteristics of Amorphous Silicon TFT and its Application in Liquid Crystal Display
4. Electronic properties of substitutionally doped amorphous Si and Ge
5. Highly conductive silicon films via plasma‐enhanced chemical vapor deposition at low temperatures
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