Optical Reflection Studies of Damage in Ion Implanted Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1658329
Reference11 articles.
1. Conversion of crystalline germanium to amorphous germanium by ion bombardment
2. Observation of ion bombardment damage in silicon
3. ION IMPLANTATION OF SILICON: I. ATOM LOCATION AND LATTICE DISORDER BY MEANS OF 1.0-MeV HELIUM ION SCATTERING
4. ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION
5. DIRECT EVIDENCE OF DIVACANCY FORMATION IN SILICON BY ION IMPLANTATION
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