Ion focusing in enhanced glow discharge plasma immersion ion implantation of hydrogen and nitrogen into silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3467967
Reference16 articles.
1. Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
2. Hybrid evaporation: Glow discharge source for plasma immersion ion implantation
3. Evaporation–glow discharge hybrid source for plasma immersion ion implantation
4. Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation
5. Theoretical investigation of sheath expansion and implant fluence uniformity in enhanced glow discharge plasma immersion ion implantation
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon;Review of Scientific Instruments;2014-06
2. Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation;IEEE Transactions on Plasma Science;2013-03
3. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model;Acta Physica Sinica;2012
4. Effect of physical properties of polymer on ion implantation;Acta Physica Sinica;2012
5. Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation;Applied Physics Letters;2011-01-10
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