The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method-Reference-Cited by-同舟云学术

The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method

Published:2019-12-16 Issue:25 Volume:115 Page:251902
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Harthcock C.¹,Qiu S. R.¹^ORCID,Negres R. A.¹^ORCID,Hammons J. A.¹^ORCID,Voisin T.¹,Guss G.¹,Martin A. A.¹^ORCID,Stolz C. J.¹,Menor M. G.¹,Bhowmik G.²,Huang M.²^ORCID

Affiliation:

1. Physical and Life Sciences Directorate, Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA

2. Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, 257 Fuller Road, Albany, New York 12203, USA

Funder

U.S. Department of Energy

Lawrence Livermore National Laboratory

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5129454

Reference37 articles.

1. Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering

2. HfO2 films with high laser damage threshold

3. Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy

4. Research on the laser damage performance of high reflection coatings at 355 nm

5. High dielectric constant oxides

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