Use of electric probes in silane radio frequency discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332758
Reference26 articles.
1. Ion–surface interactions during vapor phase crystal growth by sputtering, MBE, and plasma‐enhanced CVD: Applications to semiconductors
2. Plasma Diagnostics and Energy Transport of a dc Discharge Used for Sputtering
3. Plasma diagnostics with electric probes
4. Plasma characterization in sputtering processes using the Langmuir probe technique
5. Silane dissociation mechanisms and thin film formation in a low pressure multipole dc discharge
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