Optical band gap analysis and modeling for ultra-thin high-k dielectrics in high-k/metal gate transistors

Author:

Dai Min1,Zhao Qiang2,Hu Dawei2,Schepis Dominic1,Di Ming2

Affiliation:

1. GLOBALFOUNDRIES, Inc., Hopewell Junction, New York 12533, USA

2. KLA-Tencor, Inc., Milpitas, California 95035, USA

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Reference26 articles.

1. K. Mistry , C. Allen , C. Auth , B. Beattie , D. Bergstrom , M. Bost , M. Brazier , M. Buehler , A. Cappellani , R. Chau et al., in 2007 IEEE International Electron Devices Meeting (IEDM) (2007), pp. 247–250.

2. High-κ gate dielectrics: Current status and materials properties considerations

3. Band alignment of TiN/HfO2 interface of TiN/HfO2/SiO2/Si stack

4. Investigation of N Type Metal TiAlC by Thermal Atomic Layer Deposition Using TiCl4and TEA as Precursors

5. C. Suarez-Segovia , C. Leroux , F. Domengie , K. Dabertrand , V. Joseph , G. Romano , P. Caubet , S. Zoll , O. Weber , G. Ghibaudo , G. Reimbold , and M. Haond , in 2015 45th European Solid State Device Research Conference (ESSDERC) (2015), pp. 246–249.

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