An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy-Reference-Cited by-同舟云学术

An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy

Author:

Shimizu Masahiro¹²,Okamoto Chihiro³,Umeda Kenichi¹⁴,Watanabe Shinji¹^ORCID,Ando Toshio¹²^ORCID,Kodera Noriyuki¹²^ORCID

Affiliation:

1. WPI Nano Life Science Institute (WPI-NanoLSI), Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

2. CREST/JST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan

3. Department of Physics, Institute of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan

4. PRESTO/JST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan

Funder

Core Research for Evolutional Science and Technology

Precursory Research for Embryonic Science and Technology

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

Instrumentation

Link

Reference34 articles.

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