Mass and energy dependence of depth resolution in secondary‐ion mass spectrometry experiments with iodine, oxygen, and cesium beams on AlGaAs/GaAs multilayer structures-Reference-Cited by-同舟云学术

Mass and energy dependence of depth resolution in secondary‐ion mass spectrometry experiments with iodine, oxygen, and cesium beams on AlGaAs/GaAs multilayer structures

Published:1989-04-17 Issue:16 Volume:54 Page:1531-1533
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Meuris M.,Vandervorst W.,De Bisschop P.,Avau D.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.101341

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5. A Monte Carlo computer program for the transport of energetic ions in amorphous targets

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4. Short Communication SIMS study of GaAsN/GaAs multiple quantum wells;Surface and Interface Analysis;2000

5. Cascade mixing inAlxGa1−xAs/GaAsduring sputter profiling by noble-gas ions;Physical Review B;1999-11-15