Quadratic electromechanical strain in silicon investigated by scanning probe microscopy

Author:

Yu Junxi12,Esfahani Ehsan Nasr3ORCID,Zhu Qingfeng1,Shan Dongliang1,Jia Tingting2,Xie Shuhong1,Li Jiangyu23

Affiliation:

1. Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, and School of Materials Science and Engineering, Xiangtan University, Xiangtan, Hunan 411105, China

2. Shenzhen Key Laboratory of Nanobiomechanics, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong 518055, China

3. Department of Mechanical Engineering, University of Washington, Seattle, Washington 98195, USA

Funder

Leading Talents Program of Guangdong Province

National Key Research of China

National Science Foundation

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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