A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine
Author:
Affiliation:
1. Department of Electrical Engineering, Harbin Institute of Technology, Harbin, China
2. Center for Electrical Machines and Power Electronics, University of Technology Sydney, Sydney, NSW2007, Australia
Funder
National Science and Technology Development Agency (NSTDA)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4917332
Reference4 articles.
1. Modeling and analysis of a magnetically levitated synchronous permanent magnet planar motor
2. Analysis and comparison of two two-dimensional Halbach permanent magnet arrays for magnetically levitated planar motor
3. Magnetically Levitated Planar Actuator With Moving Magnets
4. Analytical Calculation of the Force Between a Rectangular Coil and a Cuboidal Permanent Magnet
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3. Analysis and Modeling of a Magnetically Levitated Synchronous Permanent Magnet Planar Motor with Concentric Structure Winding;2022 IEEE 5th International Electrical and Energy Conference (CIEEC);2022-05-27
4. Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review;International Journal of Mechanical System Dynamics;2021-09
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