Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1555682
Reference31 articles.
1. Two‐dimensional model of ion dynamics during plasma source ion implantation
2. Pulsed-sheath ion dynamics in a trench
3. Collisional sheath dynamics
4. Analytic theory of sheath expansion into a cylindrical bore
5. Sheath expansion into a large bore
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