Quantitative determination of elemental diffusion from deeply buried layers by photoelectron spectroscopy-Reference-Cited by-同舟云学术

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Quantitative determination of elemental diffusion from deeply buried layers by photoelectron spectroscopy

Published:2018-08-28 Issue:8 Volume:124 Page:085115
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zborowski C.¹²^ORCID,Renault O.³,Torres A.³,Guedj C.³,Yamashita Y.⁴,Ueda S.⁴,Grenet G.¹,Tougaard S.²

Affiliation:

1. INL (UMR5270/CNRS), ECL, Université de Lyon, F-69134 Ecully, France

2. Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, Odense M, Denmark

3. Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France

4. National Institute for Materials Science, Tsukuba, Ibaraki, Japan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5033453

Reference19 articles.

1. Formation of Ohmic contacts in AlGaN/GaN HEMT structures at 500°C by Ohmic contact recess etching

2. Observation of a two‐dimensional electron gas in low pressure metalorganic chemical vapor deposited GaN‐AlxGa1−xN heterojunctions

3. Determination of the input parameters for inelastic background analysis combined with HAXPES using a reference sample

4. Accuracy of the non-destructive surface nanostructure quantification technique based on analysis of the XPS or AES peak shape

5. Energy loss in XPS: Fundamental processes and applications for quantification, non-destructive depth profiling and 3D imaging

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1. Introduction to reproducible laboratory hard x-ray photoelectron spectroscopy;Journal of Vacuum Science & Technology A;2024-07-15

2. HAXPES: Inelastic background for characterization of nanostructured materials;Surface and Interface Analysis;2023-11-28

3. Magic angle HAXPES;Journal of Electron Spectroscopy and Related Phenomena;2023-04

4. Assessing advanced methods in XPS and HAXPES for determining the thicknesses of high-k oxide materials: From ultra-thin layers to deeply buried interfaces;Applied Surface Science;2023-01

5. Reference survey spectra of elemental solid measured with Cr Kα photons as a tool for Quases analysis (4): Group III and IV elements (B, Al, In, C, Si, Ge, Sn, Pb);Surface Science Spectra;2022-09-16

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