Stress in oxidized porous silicon layers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.337036
Reference13 articles.
1. Silicon on insulators: Different approaches - A review
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3. Complete dielectric isolation by highly selective and self‐stopping formation of oxidized porous silicon
4. Isolation of silicon film grown on porous silicon layer
5. Control of lattice parameters and dislocations in the system Ga1−xAlxAs1−yPy/GaAs
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