Silicon on insulators: Different approaches - A review
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference41 articles.
1. Deformation in Dielectric‐Isolated Substrates and Its Control by a Multilayer Polysilicon Support Structure
2. Origin and control of material defects in silicon VLSI technologies: An overview
3. Laser crystallization of thin Si films on amorphous insulating substrates
4. Microstructural defects in laser recrystallized, graphite strip heater recrystallized and buried oxide silicon-on-insulator systems: A status report
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