One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1378059
Reference33 articles.
1. RF Plasmas in Methane: Prediction of Plasma Properties and Neutral Radical Densities with Combined Gas-Phase Physics and Chemistry Model
2. Plasma processes in methane discharges during r.f. plasma-assisted chemical vapour deposition of a-C:H thin films
3. Microwave plasma chemical vapour deposition of diamond like carbon thin films
4. A combined plasma‐surface model for the deposition of C:H films from a methane plasma
5. Inductively coupled r.f. plasma assisted chemical vapour deposition of diamond-like carbon coatings
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