Blocking germanium diffusion inside silicon dioxide using a co-implanted silicon barrier
Author:
Affiliation:
1. INRS-EMT, 1650 boul. Lionel-Boulet, Varennes, Quebec J3X 1S2, Canada
2. LARN, Centre de Recherche en Physique de la Matière et du Rayonnement, University of Namur (FUNDP), B-5000 Namur, Belgium
Funder
MRIF
PRIMA Quebec
Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5002693
Reference35 articles.
1. Energy conversion approaches and materials for high-efficiency photovoltaics
2. Method for fabricating third generation photovoltaic cells based on Si quantum dots using ion implantation into SiO2
3. Multiple Exciton Generation in Colloidal Silicon Nanocrystals
4. Direct generation of multiple excitons in adjacent silicon nanocrystals revealed by induced absorption
5. Dielectric engineering of Ge nanocrystal/SiO2 nanocomposite thin films with Ge ion implantation: Modeling and measurement
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. RF and linearity analysis of gate engineered dual heterojunction charge plasma TFET with improved ambipolarity;Journal of Materials Science: Materials in Electronics;2024-02
2. Formation of crystalline Si1-xGex top layers by ion implantation in crystalline silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-05
3. Influence of oxygen co-implantation on germanium out-diffusion and nanoclustering in SiO2/Si films;Thin Solid Films;2022-03
4. 18O(p,α)15N isotopic tracing of germanium diffusion in SiO2/Si films;Journal of Applied Physics;2021-09-14
5. Control of germanium diffusion using low quantities of co-implanted silicon isotopes;Journal of Applied Physics;2020-09-28
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3