Gas convection caused by electron pressure drop in the afterglow of a pulsed inductively coupled plasma discharge
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3368124
Reference25 articles.
1. Neutral transport in high plasma-density reactors
2. Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo
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5. Enhanced Plasma Transport Due To Neutral Depletion
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