Active damping and disturbance rejection control of a six-axis magnetic levitation stage-Reference-Cited by-同舟云学术

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Active damping and disturbance rejection control of a six-axis magnetic levitation stage

Published:2018-07 Issue:7 Volume:89 Page:075109
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Sheng Xiaochao¹^ORCID,Menq Chia-Hsiang²,Tao Tao¹³^ORCID

Affiliation:

1. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China

2. Department of Mechanical and Aerospace Engineering, The Ohio State University, Columbus, Ohio 43210, USA

3. Shaanxi Key Laboratory of Intelligent Robots, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China

Funder

China Scholarship Council

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5010432

Reference32 articles.

1. A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part I. Modeling and analyses

2. Multi-layer alignment control of a large area nano-imprinting stage

3. OctoMag: An Electromagnetic System for 5-DOF Wireless Micromanipulation

4. 6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

5. Design of an Image-Servo Mask Alignment System Using Dual CCDs with an XXY Stage

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Payload-agnostic decoupling and hybrid vibration isolation control for a maglev platform with redundant actuation;Mechanical Systems and Signal Processing;2021-01

2. Simulation of a Synchronous Planar Magnetically Levitated Motion System Based on a Real-Time Analytical Force Model;Energies;2020-12-02

3. Model-free adaptive control for the PEMFC air supply system based on interval type-2 fuzzy logic systems;Journal of Renewable and Sustainable Energy;2020-11

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