High-voltage AlGaN/GaN heterojunction lateral photoconductive semiconductor switch based on semi-insulating 4H-SiC substrate

Abstract

A novel high-power AlGaN/GaN heterojunction lateral photoconductive semiconductor switch (PCSS) based on the SiC substrate is proposed, which achieves high dark-state resistance characteristics by groove etching. Under the action of biased electric field and incident laser, a high concentration of two-dimensional electron gas is formed at the heterojunction interface. The photo-generated free carriers transport along the heterojunction interface, which improves the utilization efficiency of photo-generated carriers. Moreover, the simulation of the current density distribution of the PCSS provides theoretical support for this phenomenon. Compared with the conventional GaN PCSS, the power capacity and conduction characteristics are further improved. The test results show that the output current of the device increases significantly after the introduction of the AlGaN/GaN heterojunction. At the biased voltage of ∼34 kV, the maximum output current of the AlGaN/GaN PCSS reaches 205 A.