Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties-Reference-Cited by-同舟云学术

Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

Published:2014-07-21 Issue:3 Volume:116 Page:034102
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Stoeckel C.,Kaufmann C.,Hahn R.,Schulze R.,Billep D.,Gessner T.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4887799

Reference27 articles.

1. Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators

2. Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

3. Non-linear vibrations and frequency response analysis of piezoelectrically driven microcantilevers

4. C. Stoeckel , “ Integration piezoelektrischer aluminiumnitrid-schichten in Si-basierte mikroelektromechanische systeme,” Master's thesis ( Chemnitz University of Technology, 2012).

5. AlN as an actuation material for MEMS applications

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