Gradient magnetron co-sputtered μm-thick Al–Si films on dielectric substrates for operation in the millimeter-wave band
Author:
Affiliation:
1. Saratov State University, 83 Astrakhanskaya St., Saratov 410004, Russia
2. Saratov Branch, Institute of Radio Engineering and Electronics, RAS, Saratov 410019, Russia
Funder
Russian Foundation for Basic Research
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0058572
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