Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry
Author:
Affiliation:
1. LAPLACE (Laboratoire Plasma et Conversion d’Energie), Université de Toulouse, CNRS, UPS, INPT, 118 Route de Narbonne, F-31062 Toulouse cedex 9, France
Funder
RTRA-STAE, Toulouse, France, project 3PCkeys
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4966254
Reference39 articles.
1. In situ laser diagnostic studies of plasma‐generated particulate contamination
2. Particulate formation and dusty plasma behaviour in argon-silane RF discharge
3. Nonthermal plasma synthesis of semiconductor nanocrystals
4. Cyclic powder formation during pulsed injection of hexamethyldisiloxane in an axially asymmetric radiofrequency argon discharge
5. Influence of Argon and Nitrogen Admixture in HMDSO/O2 Plasmas onto Powder Formation
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